1.

Conference Proceedings
Conference Proceedings
1. Aggressive Monitoring of OSFs Using High Temperature Oxidation
Bae, K.-M. ; Kim, J.-R. ; Lee, D.-M. ; Kim, S-S. ; Koh, C.-G. ; Pyi, S-H.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.189-200,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
2.

Conference Proceedings
Conference Proceedings
2. EFFECTIVE INTRINSIC GETTERING OF COPPER DURNG A SUB-QUARTER MICRON CMOS PROCESS
Bae, K-M. ; Kim, J-R. ; Hong, Y-K. ; So, S-I. ; Lee, S-C. ; Kim, S-S. ; Ha, S-W. ; Koh, C-G. ; Pyi, S-H. ; Lee, D-M.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.786-792,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
3.

Conference Proceedings
Conference Proceedings
3. EFFECTIVE INTRINSIC GETTERING OF COPPER DURNG A SUB-QUARTER MICRON CMOS PROCESS
Bae, K-M. ; Kim, J-R. ; Hong, Y-K. ; So, S-I. ; Lee, S-C. ; Kim, S-S. ; Ha, S-W. ; Koh, C-G. ; Pyi, S-H. ; Lee, D-M.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.786-792,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2