1.

Conference Proceedings
Conference Proceedings
1. Cost and revenue impact of advanced process control (APC) with an emphasis on run-to-run control (R2R)
Stanley, T.D. ; Markle, R.J. ; Eck, B.V. ; Cusson, B.K. ; Purdy, M.A. ; Stanley, K.J.
Pub. info.: Advanced process control and automation : 27 February, 2003, Santa Clara, California, USA.  pp.130-138,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5044
2.

Conference Proceedings
Conference Proceedings
2. Recursive least squares estimation and its application to shallow trench isolation
Wang, J. ; Qin, S.J. ; Bode, C.A. ; Purdy, M.A.
Pub. info.: Advanced process control and automation : 27 February, 2003, Santa Clara, California, USA.  pp.109-120,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5044