Self-aligned silicide process technology for sub-0.25-ヲフm geometries
- Author(s):
White,T.R. ( Motorola ) Kolar,D. ( Motorola ) Jahanbani,M. ( Motorola ) Frisa,L.E. ( Motorola ) Nagabushnam,R. ( Motorola ) Chuang,H. ( Motorola ) Tsui,P. ( Motorola ) Cope,J. ( Motorola ) Pulvirent,L. ( Motorola ) Bolton,S. ( Motorola ) - Publication title:
- Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3506
- Pub. Year:
- 1998
- Page(from):
- 112
- Page(to):
- 119
- Pub. info.:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429650 [0819429651]
- Language:
- English
- Call no.:
- P63600/3506
- Type:
- Conference Proceedings
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