1.

Conference Proceedings
Conference Proceedings
1. High-etch-rate deep anisotropic plasma etching of silicon for MEMS fabrication
Pandhumsoporn,T. ; Wang.L. ; Feldbaum,M. ; Gadgil,P. ; Puech,M. ; Maquin,P.
Pub. info.: Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California.  pp.93-101,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3328
2.

Conference Proceedings
Conference Proceedings
2. High-etch-rate anisotropic deep silicon plasma etching for the fabrication of microsensors
Pandhumsoporn,T. ; Feldbaum,M. ; Gadgil,P. ; Puech,M. ; Maquin,P.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.94-102,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879