1.

Conference Proceedings
Conference Proceedings
1. Process Design and Integration of Salicide and Source/Drain Process Modules for Improved Device Performance
Apte, Pushkar P. ; Saxena, Sharad ; Rao, Suraj ; Vasanth, Karthik ; Prinslow, Douglas A. ; Kittl, Jorge A. ; Breedijk, Terence ; Pollack, Gordon
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.319-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
2.

Conference Proceedings
Conference Proceedings
2. Process Design and Integration of Salicide and Source/Drain Process Modules for Improved Device Performance
Apte, Pushkar P. ; Saxena, Shared ; Rao, Suraj ; Vasanth, Karthik ; Prinslow, Douglas A. ; Kittl, Jorge A. ; Breedijk, Terence ; Pollack, Gordon
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.251-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
3.

Conference Proceedings
Conference Proceedings
3. Process Modeling and Integration of the Salicide Process Module for Sub-Half Micron Technology
Apte, Pushkar P. ; Prinslow, Douglas A. ; Kittl, Jorge A. ; List, R. Scott ; Pollack, Gordon
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.233-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402