1.

Conference Proceedings

Conference Proceedings
Pressecq,F. ; Lafontan,X. ; Perez,G. ; Fortea,J.-P.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  4558  pp.89-96,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
2.

Conference Proceedings

Conference Proceedings
Lafontan,X. ; Dufaza,C. ; Robert,M. ; Perez,G. ; Pressecq,F.
Pub. info.: Materials and Device Characterization in Micromachining III.  4175  pp.149-157,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4175
3.

Conference Proceedings

Conference Proceedings
Lafontan,X. ; Dufaza,C. ; Perez,G. ; Pressecq,F.
Pub. info.: Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France.  pp.236-243,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4019
4.

Conference Proceedings

Conference Proceedings
Lafontan,X. ; Pressecq,F. ; Perez,G. ; Dufaza,C. ; Karam,J.-M.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  4558  pp.11-21,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
5.

Conference Proceedings

Conference Proceedings
Lafontan,X. ; Dufaza,C. ; Robert,M. ; Pressecq,F. ; Perez,G.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France.  4408  pp.381-390,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4408
6.

Conference Proceedings

Conference Proceedings
Goy,J. ; Courtois,B. ; Karam,J.M. ; Pressecq,F.
Pub. info.: Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France.  pp.145-152,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4019
7.

Conference Proceedings

Conference Proceedings
Cruzel,S. ; Esteve,D. ; Dilhan,M. ; Fourniols,J.Y. ; Pressecq,F. ; Puig,O. ; Simonne,J.J.
Pub. info.: MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California.  pp.148-155,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3880