1.

Conference Proceedings
Conference Proceedings
1. New surface photovoltage (SPV) method for high precision measurement of the minority carrier diffusion length and surface recombination velocity in silicon wafers
Faifer, V. ; Edelman, P. ; Kontkiewicz, A. ; Lagowski, J. ; Hoff, A. ; Dyukov, V. ; Pravdivtsev, A. ; Kornienko, I.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.73-82,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30
2.

Conference Proceedings
Conference Proceedings
2. Synchronized low coherence interferometry for in situ and ex situ metrology for semiconductor manufacturing [5880-18]
Walecki, W. J. ; Pravdivtsev, A. ; Lai, K. ; Santos II, M. ; Koo, A.
Pub. info.: Optical Diagnostics.  pp.58800H-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5880
3.

Conference Proceedings
Conference Proceedings
3. Low-coherence interferometric absolute distance gauge for study of MEMS structures
Walecki, W.J. ; Lai, K. ; Pravdivtsev, A. ; Souchkov, V. ; Van, P. ; Azfar, T. ; Wong, T. ; Lau, S.H. ; Koo, A.
Pub. info.: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV.  pp.182-188,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5716