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11 results

Conference Proceedings

1. CMP Applications for Sub-0.25μm Process Technologies

Pramanik, D. ; Weling, M. ; Lin, X.-W.

Pub. info.:	Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing. pp.1-8, 1998. Pennington, N. J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-7

Conference Proceedings

2. Interface Interstitial Recombination Rate and the Reverse Short Channel Effect

Rubin, M. E. ; Saha, S. ; Lutze, J. ; Nouri, F. ; Scott, G. ; Pramanik, D.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.213-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	568

Conference Proceedings

3. Integration of NiSi Salicide for Deep Submicron CMOS Technologies

Lin, X. W. ; Ibrahim, N. ; Topete, L. ; Pramanik, D.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.179-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

4. Analysis of Copper and Low-K Dielectric Interconnect System for 0.18-ｦﾌm Technology

Lin, X. W. ; Hui, K. ; Chanderhari, K. ; Bothra, S. ; Pramanik, D. ; Findley, P.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.399-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

5. Optimizing manufacturability for the 65-nm process node

Pramanik, D. ; Cote, M.L.

Pub. info.:	Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.326-333, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5042

Conference Proceedings

6. Correlation Between the Standard Deviation of Sheet Resistance and the Temperature of Rapid Thermal Annealing

Lin, X. W. ; Pramanik, D.

Pub. info.:	Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.181-, 1996. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	429

Conference Proceedings

7. Dielectric CMP Planarization Considerations for Deep Sub-Micron Multilevel Interconnect Processes

Weling, M. ; Bothra, S. ; Qian, L. ; Sethi, S. ; Pramanik, D.

Pub. info.:	Proceedings of the First International Symposium on Chemical Mechanical Planarization. pp.197-205, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	96-22

Conference Proceedings

8. Integration of CMP into Deep Sub-Micron Multilevel Metallization Circuits

Pramanik, D. ; Weling, M.

Pub. info.:	Proceedings of the First International Symposium on Chemical Mechanical Planarization. pp.47-58, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	96-22

Conference Proceedings

9. Assessing technology options for 65-nm logic circuits

Pramanik, D. ; Cote, M.L. ; Beaudette, K. ; Axelrad, V.

Pub. info.:	Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.30-41, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5042

10.

Conference Proceedings

10. Cost effective strategies for ASIC masks

Pramanik, D. ; Kamberian, H.H. ; Progler, C.J. ; Sanie, M. ; Pinto, D.

Pub. info.:	Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA. pp.142-152, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5043

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Author: Pramanik, D.