Kuech, T.F. ; Buchan, N.I. ; Scilla, G. ; Cardone, F. ; Potemski, R.
Pub. info.:
Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.171-176, 1991. Pittsburgh, Pa.. Materials Research Society
Goorsky, M.S. ; Kuech, T.F. ; Mooney, P.M. ; Cardone, F. ; Potemski, R.
Pub. info.:
Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.177-182, 1991. Pittsburgh, Pa.. Materials Research Society
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.351-356, 1990. Pittsburgh, Pa.. Materials Research Society