1.

Conference Proceedings
Conference Proceedings
1. Laser sample stage-based image resolution enhancement method for SEMs
Vladar, A.E. ; Jayewardene, E.C. ; Damazo, B.N. ; Keery, W.J. ; Postek, M.T., Jr.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.1382-1388,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
2.

Conference Proceedings
Conference Proceedings
2. Nanometer-scale metrology: meeting the nanotechnology measurement challenges
Postek, M.T., Jr.
Pub. info.: Nanostructure Science, Metrology, and Technology.  pp.102-111,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4608
3.

Conference Proceedings
Conference Proceedings
3. Nanostructures and biology: some introductory remarks
Postek, M.T., Jr. ; Peckerar, M.C.
Pub. info.: Nanostructure Science, Metrology, and Technology.  pp.229-229,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4608
4.

Conference Proceedings
Conference Proceedings
4. Toward traceability for at-line AFM dimensional metrology
Dixson, R.G. ; Guerry, A. ; Bennett, M.H. ; Vorburger, T.V. ; Postek, M.T., Jr.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.313-335,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
5.

Conference Proceedings
Conference Proceedings
5. Scanning electron microscope analog of scatterometry
Villarrubia, J.S. ; Vladar, A.E. ; Lowney, J.R. ; Postek, M.T., Jr.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.304-312,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689