1.

Conference Proceedings
Conference Proceedings
1. CAD tool environment for MEMS process design support
Schmidt, T. ; Wagener, A. ; Popp, J. ; Hahn, K. ; Bruck, R.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.318-325,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
2.

Conference Proceedings
Conference Proceedings
2. EXTENDED-MIRAS: The Instrumental Approach for the Search of Traces of Extinct and Extant Life on Mars, Measuring Scenario
Popp, J.
Pub. info.: Proceedings of the III European Workshop on Exo-Astrobiology : Mars, the search for life : 18-20 November 2003, Madrid, Spain.  pp.131-136,  2004.  Noordwijk.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 545
3.

Conference Proceedings
Conference Proceedings
3. Technology interfaces to microsystem and nanoelectronic processes
Schmidt, T. ; Wagener, A. ; Popp, J. ; Hahn, K.
Pub. info.: Smart structures, devices, and systems II : 13-15 December 2004, Sydney, Australia.  pp.288-296,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5649
4.

Conference Proceedings
Conference Proceedings
4. Investigations of Mars Model Minerals by In-Situ Laser Raman Spectroscopy
Popp, J.
Pub. info.: Exo-/astro-biology : proceedings of the first European workshop, 21-23 May 2001, ESRIN, Frascati, Italy.  pp.193-196,  2001.  Noordwijk, The Netherlands.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 496
5.

Conference Proceedings
Conference Proceedings
5. Raman Spectroscopy as a Suitable Tool for Biological and Mineralogical IN SITU Planetary Studies
Tarcea, N. ; Popp, J. ; Schmitt, M.
Pub. info.: Proceedings of the Second European Workshop on Exo-astrobiology : 16-19 September 2002, Graz, Austria.  pp.399-402,  2002.  Noordwijk, The Netherlands.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 518
6.

Conference Proceedings
Conference Proceedings
6. MEMS fabrication process management environment
Popp, J. ; Schmidt, T. ; Wagener, A. ; Hahn, K.
Pub. info.: Micromachining and Microfabrication Process Technology X.  pp.148-158,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5715
7.

Conference Proceedings
Conference Proceedings
7. Process management and design for MEMS and microelectronics technologies
Hahn, K. ; Popp, J. ; Wagener, A.
Pub. info.: Microelectronics: Design, Technology, and Packaging.  pp.322-330,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5274
8.

Conference Proceedings
Conference Proceedings
8. Process design environment for microfabrication technologies
Wagener, A. ; Popp, J. ; Hahn, K.
Pub. info.: Micromachining and Microfabrication Process Technology IX.  pp.229-238,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5342
9.

Conference Proceedings
Conference Proceedings
9. Process design and tracking support for MEMS [6109-08]
Wagener, A. ; Schmidt, T. ; Popp, J. ; Hahn, K. ; Bruck, R. ; Ortloff, D.
Pub. info.: Micromachining and Microfabrication Process Technology XI.  pp.610908-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6109