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5 results

1.

Conference Proceedings

1. PHOTOREFLECTANCE CHARACTERIZATION OF SILICON FILMS ON INSULATOR

Giordana, Adraina ; Glosser, R. ; Pellegrino, Joseph G. ; Qadri, S. ; Twigg, M. E. ; Richmond, E. D. ; Joyner, Keith ; Pollack, Gordon

Pub. info.:	Thin films : stresses and mechanical properties II : symposium held April 16-19, 1990, San Francisco, California, U.S.A.. pp.349-354, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	188

2.

Conference Proceedings

2. Process Design and Integration of Salicide and Source/Drain Process Modules for Improved Device Performance

Apte, Pushkar P. ; Saxena, Sharad ; Rao, Suraj ; Vasanth, Karthik ; Prinslow, Douglas A. ; Kittl, Jorge A. ; Breedijk, Terence ; Pollack, Gordon

Pub. info.:	Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.319-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	525

3.

Conference Proceedings

3. Process Design and Integration of Salicide and Source/Drain Process Modules for Improved Device Performance

Apte, Pushkar P. ; Saxena, Shared ; Rao, Suraj ; Vasanth, Karthik ; Prinslow, Douglas A. ; Kittl, Jorge A. ; Breedijk, Terence ; Pollack, Gordon

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.251-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

4.

Conference Proceedings

4. A MODEL FOR LOW-RESISTIVITY TiSi2 FORMATION ON NARROW POLYSILICON LINES

Apte, Pushkar P. ; Pollack, Gordon

Pub. info.:	Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA. pp.539-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	355

5.

Conference Proceedings

5. Process Modeling and Integration of the Salicide Process Module for Sub-Half Micron Technology

Apte, Pushkar P. ; Prinslow, Douglas A. ; Kittl, Jorge A. ; List, R. Scott ; Pollack, Gordon

Pub. info.:	Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.233-, 1996. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	402

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