1.

Conference Proceedings
Conference Proceedings
1. PHOTOREFLECTANCE CHARACTERIZATION OF SILICON FILMS ON INSULATOR
Giordana, Adraina ; Glosser, R. ; Pellegrino, Joseph G. ; Qadri, S. ; Twigg, M. E. ; Richmond, E. D. ; Joyner, Keith ; Pollack, Gordon
Pub. info.: Thin films : stresses and mechanical properties II : symposium held April 16-19, 1990, San Francisco, California, U.S.A..  pp.349-354,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 188
2.

Conference Proceedings
Conference Proceedings
2. Process Design and Integration of Salicide and Source/Drain Process Modules for Improved Device Performance
Apte, Pushkar P. ; Saxena, Sharad ; Rao, Suraj ; Vasanth, Karthik ; Prinslow, Douglas A. ; Kittl, Jorge A. ; Breedijk, Terence ; Pollack, Gordon
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.319-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
3.

Conference Proceedings
Conference Proceedings
3. Process Design and Integration of Salicide and Source/Drain Process Modules for Improved Device Performance
Apte, Pushkar P. ; Saxena, Shared ; Rao, Suraj ; Vasanth, Karthik ; Prinslow, Douglas A. ; Kittl, Jorge A. ; Breedijk, Terence ; Pollack, Gordon
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.251-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
4.

Conference Proceedings
Conference Proceedings
4. A MODEL FOR LOW-RESISTIVITY TiSi2 FORMATION ON NARROW POLYSILICON LINES
Apte, Pushkar P. ; Pollack, Gordon
Pub. info.: Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA.  pp.539-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 355
5.

Conference Proceedings
Conference Proceedings
5. Process Modeling and Integration of the Salicide Process Module for Sub-Half Micron Technology
Apte, Pushkar P. ; Prinslow, Douglas A. ; Kittl, Jorge A. ; List, R. Scott ; Pollack, Gordon
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.233-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402