1.

Conference Proceedings

Conference Proceedings
Plat,M.V. ; Lyons,C.F. ; Wilkison,A. ; Schefske,J.A. ; Kim,H.-E.
Pub. info.: Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK.  pp.162-169,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4404
2.

Conference Proceedings

Conference Proceedings
Plat,M.V. ; Nguyen,K.B. ; Spence,C.A. ; Lyons,C.F. ; Wilkison,A.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.206-214,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
3.

Conference Proceedings

Conference Proceedings
Spence,C.A. ; Plat,M.V. ; Sahouria,E.Y. ; Cobb,N.B. ; Schellenberg,F.M.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.277-287,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
4.

Conference Proceedings

Conference Proceedings
Pike,C. ; Bell,S. ; Plat,M.V. ; King,P. ; Nguyen,K.B. ; Lyons,C.F. ; Levinson,H.J. ; Phan,K.A. ; Okoroanyanwu,U.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.328-333,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
5.

Conference Proceedings

Conference Proceedings
Spence,C.A. ; Plat,M.V. ; Sahouria,E.Y. ; Cobb,N.B. ; Schellendberg,F.M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.650-660,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
6.

Conference Proceedings

Conference Proceedings
Plat,M.V. ; Spence,C.A. ; Lyons,C.F. ; Wilkison,A.
Pub. info.: Optical Microlithography XIV.  4346  pp.851-857,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346