1.

Conference Proceedings

Conference Proceedings
Wallrabe,U. ; Dittrich,H. ; Friedsam,G. ; Hanemann,Th. ; Mohr,J. ; Muller,K. ; Piotter,V. ; Ruther,P. ; Schaller,Th. ; Zissler,W.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France.  pp.478-485,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4408
2.

Conference Proceedings

Conference Proceedings
Benzler,T. ; Piotter,V. ; Hanemann,T. ; Mueller,K. ; Norajitra,P. ; Ruprecht,R. ; Hausselt,J.H.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.53-60,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
3.

Conference Proceedings

Conference Proceedings
Piotter,V. ; Benzler,T. ; Hanemann,T. ; H.Wo1lmer ; Ruprecht,R. ; HauBelt,J.H.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.456-463,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
4.

Conference Proceedings

Conference Proceedings
Piotter,V. ; Hanemann,T. ; Ruprecht,R. ; Thies,A. ; HouBelt,J.H.
Pub. info.: Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas.  pp.91-99,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3223
5.

Conference Proceedings

Conference Proceedings
Ruprecht,R. ; Bacher,W. ; HauBelt,J.H. ; Piotter,V.
Pub. info.: Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas.  pp.146-157,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2639