Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.478-485, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.53-60, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.456-463, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas. pp.91-99, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas. pp.146-157, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering