1.

Conference Proceedings
Conference Proceedings
1. Failure analysis of surface-micromachined microengines (Invited Paper)
Peterson,K.A. ; Tangyunyong,P. ; Pimentel,A.A.
Pub. info.: Materials and Device Characterization in Micromachining.  pp.190-200,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3512
2.

Conference Proceedings
Conference Proceedings
2. Failure analysis of tungsten-coated polysilicon micromachined microengines
Walraven,J.A. ; Mani,S.S. ; Fleming,J.G. ; Headley,T.J. ; Kotula,P.G. ; Pimentel,A.A. ; Rye,M.J. ; Tanner,D.M. ; Smith,N.F.
Pub. info.: MEMS Reliability for Critical Applications.  pp.49-57,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4180