1.

Conference Proceedings
Conference Proceedings
1. The Carbon Co-Implant With Spike RTA Solution for Boron Extension
Bartek J. Pawlak ; Emmanuel Augendre ; Simone Severi ; Pierre Eyben ; Tom Janssens ; Annelies Falepin ; Philippe Absil ; Wilfried Vandervorst ; Susan Felch ; Erik Collart ; Robert Schreutelkamp ; Nick Cowern
Pub. info.: Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A..  pp.21-26,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 912
2.

Conference Proceedings
Conference Proceedings
2. Analysis and Optimization of New Implantation and Activation Mechanisms in Ultra Shallow Junction Implants Using Scanning Spreading Resistance Microscopy (SSRM)
Pierre Eyben ; Simone Severi ; Ray Duffy ; Bartek J. Pawlak ; Emmanuel Augendre ; Wilfried Vandervorst
Pub. info.: Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A..  pp.203-210,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 912
3.

Conference Proceedings
Conference Proceedings
3. Enhanced Activation of Standard and Cocktail Spike Annealed Junctions With Additional Sub-Melt Laser Anneal
Simone Severi ; Emmanuel Augendre ; Bartek J. Pawlak ; Pierre Eyben ; Taiji Noda ; Susan Felch ; Annelies Falepin ; Vijay Parihar ; Robert Schreutelkamp ; Wilfried Vandervorst ; Kristin De Meyer
Pub. info.: Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A..  pp.39-44,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 912
4.

Conference Proceedings
Conference Proceedings
4. Quantitative Two-Dimensional Carrier Mapping in Silicon Nanowire-Based Tunnel-Field Effect Transistors Using Scanning Spreading Resistance Microscopy
Andreas Schulze ; Thomas Hantschel ; Pierre Eyben ; Anne Vandooren ; Rita Rooyackers ; Jay Mody ; Anne S. Verhulst ; Wilfried Vandervorst
Pub. info.: Low-dimensional functional nanostructures : fabrication, characterization and applications : symposium held April 5-9, 2010, San Francisco, California.  pp.59-66,  2010.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1258
5.

Conference Proceedings
Conference Proceedings
5. Scanning Spreading Resistance Microscopy for 3D-Carrier Profiling in FinFET-Based Structures
Jay Mody ; Pierre Eyben ; Wouter Polspoel ; Malgorzata Jurczak ; Wilfried Vandervorst
Pub. info.: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A..  pp.49-56,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1070
6.

Conference Proceedings
Conference Proceedings
6. Micro Probe Carrier Profiling of Ultra-Shallow Structures in Germanium
Trudo Clarysse ; Alain Moussa ; Brigitte Parmentier ; Pierre Eyben ; Bastien Douhard ; Wilfried Vandervorst ; Peter F. Nielsen ; Rong Lin ; Dirch H. Petersen ; Fei Wang ; Ole Hansen
Pub. info.: Materials and devices for end-of-roadmap and beyond CMOS scaling : symposium held April 5-9, 2010, San Francisco, California.  pp.87-94,  2010.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1252