1.

Conference Proceedings
Conference Proceedings
1. Control of residual stresses in As-grown polysilicon by multi-layer deposition: The "Multipoly" process
Yang, Jie ; Kahn, H. ; He, A. Q. ; Phillips, S. M. ; Heuer, A. H.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.37-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605
2.

Conference Proceedings
Conference Proceedings
2. CMOS-compatible RF MEMS switch
Lakamraju, N. V. ; Kim, B. ; Phillips, S. M.
Pub. info.: MEMS, MOEMS, and Micromachining.  pp.193-201,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5455