1.

Conference Proceedings
Conference Proceedings
1. Next-generation lithography mask inspection
Bareket,N. ; Biellak,A. ; Pettibone,D.W. ; Stokowski,S.E.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.514-522,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
2.

Conference Proceedings
Conference Proceedings
2. UV inspection of EUV and SCALPEL reticles
Pettibone,D.W. ; Bareket,N. ; Liang,T. ; Stivers,A.R. ; Hector,S.D. ; Mangat,P.J.S. ; Resnick,D.J. ; Lercel,M.J. ; Lawliss,M. ; Magg,C. ; Novembre,A.E. ; Farrow,R.C.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.241-249,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
3.

Conference Proceedings
Conference Proceedings
3. Optical inspection of EUV and SCALPEL reticles
Pettibone,D.W. ; Stokowski,S.E.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.710-717,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409