1.

Conference Proceedings
Conference Proceedings
1. Electrical Characterization of Thin Oxide Layers by Impedance Spectroscopy Using SiliconlOxidefElectrolyte (SOE) Structures
Chemla, M. ; Bertagna, V. ; Erre, R. ; Rouclle, F. ; Petitdidier, S. ; Levy, D.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium.  pp.452-464,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-2
2.

Conference Proceedings
Conference Proceedings
2. A Neutron Reflectivity Study of Silicon Oxide Thin Films
Bertagna, V. ; Menelle, A. ; Petitdidier, S. ; Levy, D. ; Saboungi, M.-L
Pub. info.: Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium.  pp.525-532,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-2
3.

Conference Proceedings
Conference Proceedings
3. Interactions between the Conditions of Copper Electrodeposition and the Density of Hillocks
Petitdidier, S. ; Gregoire, M. ; Segaud, S. ; Courtas, S. ; Juhel, M. ; Jacquemin, J.P. ; Dumas, L.
Pub. info.: Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium.  pp.47-52,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-10
4.

Conference Proceedings
Conference Proceedings
4. PREVENTION OF Si ETCHING IN DILUTED SC1 SOLUTIONS
Bellandi, E. ; Alessandri, M. ; Lodi, D. ; Strada, M. ; Pipia, S. ; Petitdidier, S. ; Levy, D.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.337-344,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
5.

Conference Proceedings
Conference Proceedings
5. SPECTROSCOPIC AND ELECTROCHEMICAL STUDIES OF THE GROWTH OF CHEMICAL OXIDE IN SC1 AND SC2
Petitdidier, S. ; Guyader, F. ; Barla, K. ; Rouchon, D. ; Rochat, N. ; Erre, R. ; Bertagna, V.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.205-210,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
6.

Conference Proceedings
Conference Proceedings
6. ELECTROCHEMICAL STUDY OF ULTRA-THIN SILICON OXIDES
Bertagna, V. ; Erre, R. ; Petitdidier, S. ; Levy, D. ; Chemla, M.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.211-218,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
7.

Conference Proceedings
Conference Proceedings
7. Impedance Diagrams of Semiconductor/Oxide/Electrolyte (SOE) Structures to Derive Equivalent R-C Components of the Semiconductor Space Charge
Chemla, M. ; Bertagna, V. ; Erre, R. ; Ronelle, F. ; Petitdidier, S. ; Levy, D.
Pub. info.: Solid-state ionic devices III, proceedings of the international symposium.  pp.329-339,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-26
8.

Conference Proceedings
Conference Proceedings
8. Silicon Surface Chemical Treatments In Oxide/ Nitride Dielectric Stack Properties
Jacques, D. ; Petitdidier, S. ; Regolini, J.L. ; Barla, K.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.311-316,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716