1.

Conference Proceedings
Conference Proceedings
1. Wet and Dry Oxidation of Polycrystalline SixGe1-x Films
Hellberg, P-E. ; Zhang, S-L. ; d'Heurle, F. M. ; Petersson, C. S.
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.111-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533
2.

Conference Proceedings
Conference Proceedings
2. Impact of Rapid Thermal Annealing of Ti-TiN Bilayers on Subsequent Chemical Vapor Deposition of Tungsten
Mouroux, A. ; Palmans, R. ; Keinonen, J. ; Zhang, S.-L. ; Maex, K. ; Petersson, C. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.365-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
3.

Conference Proceedings
Conference Proceedings
3. Roughness Characterization by Optical Spectroscopy of CoSi2 Thin Films
Bacelli, S. ; Guizzetti, G. ; Marabelli, F. ; Hatziconstantinidou, S. ; Petersson, C. S.
Pub. info.: Structure and evolution of surfaces : symposium held December 2-5, 1996, Boston, Massachusette, U.S.A..  pp.341-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 440
4.

Conference Proceedings
Conference Proceedings
4. Properties of PTO/YBCO Heterostructure on Bare SiC Substrates
Duan, M. ; Linnros, J. ; Petersson, C. S. ; Rao, K. V.
Pub. info.: Ferroelectric thin films VI : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A..  pp.499-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 493
5.

Conference Proceedings
Conference Proceedings
5. Full band Monte Carlo simulatin of short channel MOSFETs in 4H and 6H-SiC
Hjelm, M. ; Nilsson, H-E. ; Dubaric, E. ; Persson, C. ; Kackell, P. ; Petersson, C. S.
Pub. info.: Wide-bandgap semiconductors for high-power, high-frequency, and high temperature applications--1999 : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.69-,  1999.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 572
6.

Conference Proceedings
Conference Proceedings
6. Diffusion of Arsenic in Single Crystalline CoSi2
Pisch, A. ; Cardenes, J. ; Svensson, B. G. ; Petersson, C. S.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.51-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
7.

Conference Proceedings
Conference Proceedings
7. Formation of Epitaxial CoSi2 Layers Grown from the Interaction of Co/Ti Bilayers with Si<100> Substrates
Cardenes, J. ; Zhang, S-L. ; Svensson, B. G. ; Petersson, C. S.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.155-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
8.

Conference Proceedings
Conference Proceedings
8. Interdiffusion and Phase Formation During Thermal Annealing of Ti/Mo Bilayers on Si Substrates
Mouroux, A. ; Zhang, S.-L. ; Kaplan, W. ; Nygren, S. ; Ostling, M. ; Petersson, C. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.511-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427