1.

Conference Proceedings

Conference Proceedings
Peterson, K.A. ; Park, C. ; Dutta, I.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.483-488,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
2.

Technical Paper

Technical Paper
Vakhtin, A.B. ; Peterson, K.A. ; Kane, D.J. ; Jordan, E.H. ; Hansen, G.
Pub. info.: A.S.M.E. paper.  2007.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : GT
Ser. no.: 2007