1.

Conference Proceedings

Conference Proceedings
Benito, G. ; Davis, M.J. ; Hurst, S.J. ; Sheel, D.W. ; Pemble, M.F.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.557-564,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8
2.

Conference Proceedings

Conference Proceedings
Martin, P.A. ; Holdsworth, R.J. ; Davis, M. ; Pemble, M.F. ; Sheel, D.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.176-182,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13