Microelectronic Device Technology : 1-2 October 1997, Austin, Texas. pp.383-385, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
High Purity Silicon VI : proceedings of the sixth International Symposium. pp.180-188, 2000. Pennington, N.J., Bellingham, Wash.. Electrochemical Society — SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
High Purity Silicon VI : proceedings of the sixth International Symposium. pp.145-155, 2000. Pennington, N.J., Bellingham, Wash.. Electrochemical Society — SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering