1.

Conference Proceedings
Conference Proceedings
1. Evaluating the Denuded Zone Depth by Measurements of the Recombination Activity of Bulk Defects
Polignano, M. L. ; Brambilla, M. ; Cazzaniga, F. ; Pavia, G. ; Zanderigo, F. ; Spiga, S. ; Moro, L. ; Castaldini, A. ; Cavallini, A.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.569-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
2.

Conference Proceedings
Conference Proceedings
2. Evaluation of Microstructure Evolution of Al-1%Si-0.5%Cu Thin Film Induced by Post Deposition Processing
Zaccherini, C. ; Bacchetta, M. ; Pavia, G. ; Riva, L. ; Savoia, C.
Pub. info.: Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.273-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 428
3.

Conference Proceedings
Conference Proceedings
3. Detection of metal segregation at the oxide-silicon interface
Polignano, M.L. ; Giussani, A. ; Caputo, D. ; Clementi, C. ; Pavia, G. ; Priolo, F.
Pub. info.: Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany.  pp.223-232,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-29
4.

Conference Proceedings
Conference Proceedings
4. Crystallization Behavior of Hf-Rich Aluminates and Influence on Film Dielectric Properties
Climent, M. ; Crivelli, B. ; Righini, G. ; Alberici, S. ; Alessandri, M. ; Elbaz, A.C. ; Pavia, G. ; Wiemer, C.
Pub. info.: Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.313-318,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 811
5.

Conference Proceedings
Conference Proceedings
5. Physical-Chemical Evolution of Hf-Aluminates Upon Thermal Treatments
Crivelli, B. ; Alessandri, M. ; Alberici, S. ; Brazzelli, D. ; Elbaz, A. C. ; Frabboni, S. ; Ghidini, G. ; Maes, J. W. ; Ottaviani, G. ; Pavia, G. ; Wiemer, C.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.65-72,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
6.

Conference Proceedings
Conference Proceedings
6. Defect Generation and Suppression in Device Processes Using a Shallow Trench Isolation Scheme
Peschiarolli, D. ; Brambilla, M. ; Carnevale, G.P. ; Cascella, A. ; Cazzaniga, F ; Clementi, c. ; Cremonesi, C. ; Gilardini, A. ; Martinelli, M. ; Maurelli, A ; Mica, I. ; Pavan, A. ; Pavia, G. ; Piazza, F. ; Polignano, M.L. ; Soncini, V. ; Bonera, E.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.477-488,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-6
7.

Conference Proceedings
Conference Proceedings
7. Physical-Chemical Evolution Upon Thermal Treatments of Al2O3, HfO2 and Al/Hf Composite Materials Deposited by ALCVDTM
Crivelli, B. ; Alessandri, M. ; Alberici, S. ; Cazzaniga, F. ; Dekadjevi, D. ; Maes, J.W. ; Ottaviani, G. ; Pavia, G. ; Queirolo, G. ; Santucci, S. ; Zanderigo, F.
Pub. info.: Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.149-154,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 745