1.

Conference Proceedings

Conference Proceedings
Kang,D. ; Robertson,S.A. ; Reilly,M.T. ; Pavelchek,E.K.
Pub. info.: Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK.  pp.170-179,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4404
2.

Conference Proceedings

Conference Proceedings
Nour,S. ; Pavelchek,E.K. ; Lindsay,T.K. ; Moynihan,M.L. ; Gambin,L.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.154-167,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
3.

Conference Proceedings

Conference Proceedings
Pavelchek,E.K. ; doCanto,M.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.932-943,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
4.

Conference Proceedings

Conference Proceedings
Robertson,S.A. ; Pavelchek,E.K. ; Swible-Keane,C.I. ; Bohiand,J.F. ; Reilly,M.T.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.744-758,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
5.

Conference Proceedings

Conference Proceedings
Pavelchek,E.K. ; Cernigliaro,M. ; Trefonas,P. ; doCanto,M.
Pub. info.: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  pp.140-151,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4181
6.

Conference Proceedings

Conference Proceedings
Pavelchek,E.K. ; Meador,J.D. ; Guerrero,D.J. ; Lamb,J.E.III ; Kache,A. ; doCanto,M. ; Adams,T.G. ; Stark,D.R. ; Miller,D.A.
Pub. info.: Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California.  pp.692-699,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2724
7.

Conference Proceedings

Conference Proceedings
Bohland,J.F. ; Pavelchek,E.K. ; Szmanda,C.R.
Pub. info.: Process Control and Diagnostics.  pp.124-131,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4182
8.

Conference Proceedings

Conference Proceedings
Kang,D. ; Robertson,S.A. ; Pavelchek,E.K.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.936-944,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345
9.

Conference Proceedings

Conference Proceedings
Pavelchek,E.K. ; Cernigliaro,M. ; Trefonas,P. ; Kwok,A. ; Coley,S.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.864-872,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345
10.

Conference Proceedings

Conference Proceedings
Kang,D. ; Robertson,S.A. ; Reilly,M.T. ; Pavelchek,E.K.
Pub. info.: Optical Microlithography XIV.  4346  pp.858-868,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346