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12 results

Conference Proceedings

1. FORMATION OF WELL-SEPARATED BURIED AND SURFACE NICKEL-SILICIDE LAYERS IN A SINGLE ION IMPLANTATION STEP

Wu, M.F. ; De Wachter, J. ; Hendrickx, P. ; Pattyn, H. ; Van Bavel, A.M. ; Langouche, G. ; Vanhellemont, J. ; Bender, H. ; Maenhoudt, M. ; Bruynseraede, Y.

Pub. info.:	Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.899-904, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	279

Conference Proceedings

2. PHOSPHORUS AND BORON DOPING OF SILICON THIN FILMS USING ArF EXCIMER LASER

Slaoui, A. ; Pattyn, H. ; Fogarassy, E. ; De Unamuno, S. ; Stuck, R.

Pub. info.:	Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.389-396, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	236

Conference Proceedings

3. SEGREGATION GEY?ERING BY IMPLANTATION-FORMED CAVITIES AND B-Si PRECIPITATES IN SILICON

Myers, S. ; Petersen, G.A. ; Follstaedt, D.M. ; Seager, C.H. ; Headly, T.J. ; Michael, J.R. ; Deweerd, W. ; Koops, G. ; Verheyden, J. ; Pattyn, H.

Pub. info.:	Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1150-1162, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-1(2)

Conference Proceedings

4. SELECTIVE DEPOSITION OF N+ DOPED MC-Si:H:F BY RF PLASMA CVD ON Si AND SiO2 SUBSTRATES

Baert, k. ; Deschepper, P. ; Pattyn, H. ; Nijs, J. ; Mertens, R.

Pub. info.:	Materials issues in microcrystalline semiconductors : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.359-364, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	164

Conference Proceedings

5. ArF EXCIMER LASER DOPING INTO AMORPHOUS SILICON THIN FILMS

Elliq, M. ; Slaoui, A. ; Fogarassy, E. ; Pattyn, H. ; Struck, R. ; Siffert, P.

Pub. info.:	Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.739-744, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	219

Conference Proceedings

6. ION BEAM SYNTHESIS OF BURIED CoxNi1-xSi2 LAYERS IN SILICON

Wu, M. F. ; Wachter, J. De ; Bavel, A.-M. Van ; Pattyn, H. ; Langouche, G. ; Vanhellemont, J. ; Bender, H. ; Temst, K. ; Wuyts, B. ; Bruynseraede, Y.

Pub. info.:	Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.159-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	320

Conference Proceedings

7. Growth of Co on Ag(100): A comparison of ultra low energy ion beam deposition and thermal deposition

Degroote, B. ; Dekoster, J. ; Degroote, S. ; Pattyn, H. ; Vantomme, A. ; Langouche, G. ; Hou, M.

Pub. info.:	Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.. pp.9-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	585

Conference Proceedings

8. Nanosized metallic Sn precipitates in Si, formed upon ion implantation

Barancira, T. ; De Wachter J. ; Milants, K. ; Verheyden, J. ; Deweerd, W. ; Odeurs, J. ; Pattyn, H.

Pub. info.:	Metastable phases and microstructures : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.89-94, 1996. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	400

Conference Proceedings

9. Formation and Thermal Stability of Nd0.32Y0.68Si1.7 Layers Formed by Channeled Ion Beam Synthesis

Wu, M. F. ; Vantomme, A. ; Hogg, S. ; Pattyn, H. ; Langouche, G. ; Jin, S. ; Bender, H.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.191-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

10.

Conference Proceedings

10. Structural Characterization of Ion Beam Synthesized Epitaxial ErSi2-x Layers

Bender, H. ; Wu, M. F. ; Vantomme, A. ; Pattyn, H. ; Langouche, G.

Pub. info.:	Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.499-, 1996. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	402

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