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16 results

Conference Proceedings

1. Tribology of Diamond-Like Carbon Coatings for Vacuum and Space Applications

Donnet, C. ; Le Mogne, T. ; Belin, M. ; Grill, A. ; Patel, V. ; Jahnes, C.

Pub. info.:	Proceedings of the Fifth International Symposium on Diamond Materials. pp.455-464, 1997. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-32

Conference Proceedings

2. Diamondlike Carbon Materials for the BEOL Interlayer Dielectric Applications

Grill, A. ; Jahnes, C. ; Ott, J. ; Patel, V. ; Cohln, S. ; Hummel, J. ; Mih, R. ; Liu, J.

Pub. info.:	Dielectric material integration for microelectronics. pp.118-128, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-3

Conference Proceedings

3. Multiphase Low-k Materials Prepared by PECVD

Grill, A. ; Patel, V.

Pub. info.:	Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium. pp.55-62, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-5

Conference Proceedings

4. DIAMOND-LIKE AND NITROGEN DOPED DIAMOND-LIKE CARBON DEPOSITED BY DC PACVD

Grill, A. ; Patel, V.

Pub. info.:	Proceedings of the Third International Symposium on Diamond Materials. pp.442-447, 1993. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-17

Conference Proceedings

5. Novel Low-k Dielectrics Based on DLC Materials

Grill, A. ; Patel, V. ; Jahnes, C.

Pub. info.:	Proceedings of the Fifth International Symposium on Diamond Materials. pp.512-520, 1997. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-32

Conference Proceedings

6. "Single-Site" Catalyzed Polyolefin for Fresh-Cut Produce Packaging-A Comparison between Monoextruded Blends and Coextruded Film

Patel, V. ; Mehta, S. ; Orroth, S. A. ; McCarthy, S. P.

Pub. info.:	ANTEC '99 Conference proceedings, New York City, May 2-6, 1999 : plastics bridging the millennia. 1 pp.391-395, 1999. Brookfield Center, CT. Society of Plastics Engineers, Inc. (SPE)
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	45(1)

Conference Proceedings

7. Diamondlike Carbon Materials as Low-k Dielectrics for Multilevel Interconnects in ULSI

Grill, A. ; Patel, V. ; Saenger, K. L. ; Jahnes, C. ; Cohen, S. A. ; Schrott, A. G. ; Edelstein, D. C. ; Paraszczak, J. R.

Pub. info.:	Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A.. pp.155-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	443

Conference Proceedings

8. Integration Issues for Diamond-Like Carbon in a Copper Damascene Process Flow

Grill, A. ; Jahnes, C. ; Patel, V. ; Ott, J. ; Hummel, J. ; Mih, R. ; Liu, J.

Pub. info.:	Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A.. pp.223-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	511

Conference Proceedings

9. Characteristics of low-k and ultralow-k PECVD deposited SiCOH films

Grill, A. ; Patel, V. ; Rodbell, K.P. ; Huang, E. ; Christiansen, S. ; Baklanov, M.R.

Pub. info.:	Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.569-574, 2002. Warrendale. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	716

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Conference Proceedings

10. Etch Induced Damage in High Density Inductively Coupled Plasma Etching Reactor

Zhong, W. ; Misra, D. ; Bartynski, R.A. ; Patel, V. ; Singh, B.

Pub. info.:	Proceedings of the tenth symposium on plasma processing. pp.120-131, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-20

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