1.

Conference Proceedings
Conference Proceedings
1. High Rate Dry Etching of GaN, AIN and InN in ECR Cl2/CH4/H2/Ar Plasmas
Vartuli, C. B. ; Pearton, S. J. ; Abernathy, C. R. ; Shul, R. J. ; Kilcoyne, S. P. ; Crawford, M. Hagerott ; Howard, A. J. ; Parmeter, J. E.
Pub. info.: Materials - fabrication and patterning at the nanoscale : Symposium held April 19-20, 1995, San Francisco, California, USA.  pp.37-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 380
2.

Conference Proceedings
Conference Proceedings
2. In Situ Auger Spectroscopy Investigation of InP Surfaces Treated in rf Hydrogen and Hydrogen/Methane/Argon Plasmas
Parmeter, J. E. ; Shul, R. J. ; Miller, P. A.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.309-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386