1.

Technical Paper
Technical Paper
1. Flow-Induced Vibration Analyses of Stator and Moving Rotor Cascade with Viscosity Effects.
Kim, D-H. ; Oh, S-W. ; Kim, Y-S. ; Park, O.
Pub. info.: A.S.M.E. paper.  2007.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : GT
Ser. no.: 2007
2.

Conference Proceedings
Conference Proceedings
2. Impact of mask CD error on OPC performance for 65nm technology M1 level [5992-91]
Park, O. ; Oberschmidt, J. ; Li, W. -K.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59922Q-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
3.

Conference Proceedings
Conference Proceedings
3. Model-based OPC considering process window aspects: a study
Schulze, S.F. ; Park, O. ; Zimmermann, R. ; Chen, M.-J. ; LaCour, P. ; Sahouria, E.Y. ; Granik, Y. ; Cobb, N.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1097-1105,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
4.

Conference Proceedings
Conference Proceedings
4. Process window simulation study with immersion lithography for 45-nm technology node
Park, O. ; Gutmann, A. ; Neumueller, W. ; Back, D.
Pub. info.: Optical Microlithography XVII.  pp.1555-1572,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377