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11 results

Conference Proceedings

1. Laser-induced shock wave removal of chemical-mechanical polishing slurries from silicon wafers

Lee, J.M. ; Cho, S.H. ; Park, J.G. ; Lee, S.H. ; Han, Y.P. ; Kim, S.Y.

Pub. info.:	Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.287-289, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4830

Conference Proceedings

2. COP Induced Isolation Failures in Cz Wafers

Lee, G.S. ; Kwack, K.D. ; Park, J.G. ; Park, J.M. ; Shim, T.H.

Pub. info.:	ULSI process integration : proceedings of the first international symposium. pp.255-266, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-18

Conference Proceedings

3. Effect of Crystal Defects Such as COPs, Large Dislocations, and OSF Ring on Device Integrity Degradation

Park, J.G. ; Lee, G.S. ; Park, J.M. ; Chon, S.M. ; Chung, H.K.

Pub. info.:	Proceedings of the Third International Symposium on Defects in Silicon. pp.324-341, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-1

Conference Proceedings

4. SUBSTRATE DAMAGE-FREE LASER SHOCK CLEANING OF PARTICLES

Park, J.G. ; Busnaina, A. ; Lee, J.M. ; You, S.Y.

Pub. info.:	Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.190-194, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-26

Conference Proceedings

5. Effect of High Temperature RTA on Precipitate Formation and the COP Dissolution

Park, J.G. ; Park, H.P. ; Lee, G.S. ; Kwack, K.D. ; Ryu, K.B. ; Park, J.M.

Pub. info.:	ULSI process integration : proceedings of the first international symposium. pp.157-166, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-18

Conference Proceedings

6. Effect of crystal defects on device characteristics

Park, J.G. ; Park, J.M. ; Cho, K.C. ; Lee, G.S. ; Chung, H.K.

Pub. info.:	Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.173-195, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-22

Conference Proceedings

7. Effect of Additives in Post Cu CMP Cleaning Solutions on Particle Adhesion and Removal

Hong, Y.K. ; Eom, D.H. ; Lee, S.H. ; Park, J.G. ; Busnaina, A.A.

Pub. info.:	Chemical Mechanical Planarization : proceedings of the International Symposium. pp.19-26, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-21

Conference Proceedings

8. Comparison of Oxide Breakdown Mechanism Due to D-Defects and Oxygen Precipitates

Park, J.G. ; Ushio, S. ; Takeno, H. ; Cho, K.-C. ; Kim, J.-K. ; Rozgonyi, G.A.

Pub. info.:	Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.53-64, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-33

Conference Proceedings

9. Temperature Dependent Electron Beam Induced Current Studies of MOS Capacitor Structures

Kirk, H.R. ; Park, J.G. ; Lee, D.M. ; Rozgonyi, G.A.

Pub. info.:	Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.275-285, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-1

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Conference Proceedings

10. In-situ Recycle of Used Oxide Slurry for Production

Park, J.G. ; Lee, K.J. ; Kim, M.S.

Pub. info.:	Chemical Mechanical Planarization : proceedings of the International Symposium. pp.138-147, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-21

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