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14 results

Conference Proceedings

1. Simulation of resist heating effect with e-beam lithography using distributed processing (DP) [5853-18]

Ki, W.-T. ; Ahn, B.-S. ; Park, J.-S. ; Choi, S.-W. ; Ma, S.-B. ; Han, W.-S.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XII. pp.416-424, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5853

Conference Proceedings

2. The application of phase grating to CLM technology for the sub-65nm node optical lithography [5853-55]

Yoon, G.-S. ; Kim, S.-H. ; Park, J.-S. ; Choi, S.-Y. ; Jean, C.-U. ; Shin, I.-K. ; Choi, S.-W. ; Han, W.-S.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XII. pp.703-713, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5853

Conference Proceedings

3. Hybrid PPC methodology and implementation in the correction of etch proximity

Park, C.-H. ; Rhie, S.-U. ; Chio, S.-H. ; Kim, D.-H. ; Park, J.-S. ; Kim, Y.-H. ; Yoo, M.-H. ; Kong, J.-T.

Pub. info.:	Optical Microlithography XV. Part One pp.369-376, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4691

Conference Proceedings

4. Study of Cr patch validity for ArF CPL mask and its fabrication

Kim, C.-H. ; Kim, S.-H. ; Lee, M.-S. ; Park, J.-S. ; Shin, I.-G. ; Choi, S.-W. ; Yoon, H.-S. ; Han, W.-S.

Pub. info.:	Optical Microlithography XVII. pp.1247-1254, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5377

Conference Proceedings

5. Vibration control of a passenger car using MR engine mounts

Choi, S.-B. ; Lee, H.-H. ; Song, H.-J. ; Park, J.-S.

Pub. info.:	Smart structures and materials 2002 : smart structures and integrated systems : 18-21 March 2002, San Diego, USA. pp.1-8, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4701

Conference Proceedings

6. Laser interaction with dental soft tissues: What do we know from our years of applied scientific research?

White, J.M. ; Gekelman, D. ; Shin, K.-B. ; Park, J.-S. ; Swenson, T.O. ; Rouse, B.P. ; Tran, K.T. ; Bullard, S. L. ; Scott-Beckles, L.B. ; Oto, M.G. ; Buhler, J.S. ; Yamamoto, A.

Pub. info.:	Lasers in dentistry VIII : 21-22 January 2002, San Jose, USA. pp.39-48, 2002. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4610

Conference Proceedings

7. Resolution improvement of computationally reconstructed 3D images by use of intermediate elemental images [6312-75]

Park, J.-S. ; Hwang, D.-C. ; Shin, D.-H.

Pub. info.:	Applications of digital image processing XXIX : 15-17 August 2006, San Diego, California, USA. pp.63121P-, 2006. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6312

Conference Proceedings

8. Full-chip application for SRAM gate at 100-nm node and beyond using chromeless phase lithography

Park, J.-S. ; Kim, S.-H. ; Shin, I.-K. ; Choi, S.-W. ; Sohn, J.-M. ; Lee, J.-H. ; Shin, H.-S. ; Laidig, T.L. ; Van den Broeke, D.J. ; Chen, J.F.

Pub. info.:	23rd Annual BACUS Symposium on Photomask Technology. pp.112-121, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5256

Conference Proceedings

9. Validation of ArF chromeless PSM in the sub-100-nm node DRAM cell

Lee, J.-H. ; Chung, D.-H. ; Cha, D.-C. ; Kim, H.-S. ; Park, J.-S. ; Nam, D.-G. ; Woo, S.-K. ; Cho, H.-S. ; Han, W.-S.

Pub. info.:	22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.1253-1262, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4889

10.

Conference Proceedings

10. ArF issues of 90-nm-node DRAM device integration

Goo, D.-H. ; Kim, B.-S. ; Park, J.-S. ; Yoon, K.-S. ; Lee, J.-H. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T.

Pub. info.:	Optical Microlithography XVI. Part Three pp.1296-1303, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5040

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Author: Park, J.-S.