1.

Technical Paper

Technical Paper
Kang, D.-M. ; Sah, J.-Y. ; Park, J.-R.
Pub. info.: 2005 SAE world congress : technical paper.  2005.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2005
2.

Conference Proceedings

Conference Proceedings
Yang, S.-H. ; Choi, Y.-H. ; Park, J.-R. ; Kim, Y.-H. ; Choi, S.-W. ; Yoon, H.-S. ; Sohn, J.-M.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.786-791,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
3.

Conference Proceedings

Conference Proceedings
Yang, S.-H. ; Choi, Y.-H. ; Park, J.-R. ; Kim, Y.H. ; Choi, S.-W. ; Sohn, J.-M.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.977-984,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689