1.

Conference Proceedings

Conference Proceedings
Lee, J.M. ; Cho, S.H. ; Kim, T.H. ; Park, J.-G. ; Busnaina, A.A.
Pub. info.: Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany.  pp.441-444,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5063
2.

Conference Proceedings

Conference Proceedings
Park, J.-G.
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III.  pp.228-240,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-9
3.

Conference Proceedings

Conference Proceedings
Lee, K.-B. ; Kwak, N.-J. ; Kim, S.-D. ; Kim, C.-T. ; Fu, J. ; Nahm, M.K. ; Diaz, R. ; Lai, C.S. ; Xu, Z. ; Han, B.B. ; Park, J.-G. ; Jang, W.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.333-338,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
4.

Conference Proceedings

Conference Proceedings
Park, J.-G. ; Han, J.-H.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.231-238,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
5.

Conference Proceedings

Conference Proceedings
Park, J.-G. ; Rozgonyi, G.A. ; Lee, C.-S. ; Choi, S.-P.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.457-471,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5
6.

Conference Proceedings

Conference Proceedings
Lee, S.-Y. ; Lee, S.-H. ; Eom, D.-H. ; Kim, K.-S. ; Song, H.-S. ; Park, J.-G.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.180-186,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
7.

Conference Proceedings

Conference Proceedings
Eom, D.-H. ; Lee, S.-H. ; Kim, K.-S. ; Lee, C.-H. ; Park, J.-G.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.156-163,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
8.

Conference Proceedings

Conference Proceedings
Kang, H.-G. ; Katoh, T. ; Lee, W.-M. ; Paik, U. ; Park, J.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.215-222,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
9.

Conference Proceedings

Conference Proceedings
Katoh, T. ; Kim, S.-J. ; Paik, U. ; Park, J.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.190-198,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
10.

Conference Proceedings

Conference Proceedings
Hong, Y.-K. ; Eom, D.-H. ; Park, J.-G.
Pub. info.: Thin film materials, processes, and reliability : proceedings of the international symposium.  pp.126-137,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-24