1.

Conference Proceedings
Conference Proceedings
1. EFFECT OF INTERMEDIATE THERMAL PROCESSING ON MICROSTRUCTURAL CHANGES OF OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL
Lee, J. D. ; Park, J. C. ; Krause, S. J. ; Roitman, P. ; El-Ghor, M. K.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.133-138,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235
2.

Conference Proceedings
Conference Proceedings
2. DEFECT PAIR FORMATION BY IMPLANTATION-INDUCED STRESSES IN HIGH-DOSE OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL
Lee, J. D. ; Park, J. C. ; Venables, D. ; Krause, S. J. ; Roitman, P.
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.753-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316
3.

Conference Proceedings
Conference Proceedings
3. Applications of CPL mask technology for sub-65nm gate imaging
Litt, L. C. ; Conley, W. ; Wu, W. ; Peters, R. ; Parker, C. ; Cobb, J. ; Kasprowicz, B. S. ; van den Broeke, D. ; Park, J. C. ; Karur-Shanmugam, R.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1459-1468,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
4.

Conference Proceedings
Conference Proceedings
4. Functionalized mesoporous adsorbents for Pt(II) and Pd(II) adsorption from dilute aqueous solution
Kang, T. ; Park, Y. ; Park, J. C. ; Cho, Y. S. ; Yi, J.
Pub. info.: Nanotechnology in mesostructured materials : proceedings of the 3rd International Mesostructured Materials Symposium, Jeju, Korea, July 8-11, 2002.  pp.527-530,  2003.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 146
5.

Conference Proceedings
Conference Proceedings
5. Controlling the pore sizes of SBA-15 mesoporous silica by the addition of poly(propylene oxide)
Park, J. C. ; Lee, J.H. ; Kim, P. ; yi, J.
Pub. info.: Nanotechnology in mesostructured materials : proceedings of the 3rd International Mesostructured Materials Symposium, Jeju, Korea, July 8-11, 2002.  pp.109-112,  2003.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 146
6.

Conference Proceedings
Conference Proceedings
6. Resist model calibration using 2D developed patterns for low-k1 process optimization and wafer printing predictions
Chen, T. ; Van Den Broeke, D. ; Park, S. ; Liebchen, A. ; Chen, J. F. ; Hsu, S. ; Park, J. C. ; Yu, L. ; Gronlund, K.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.434-444,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
7.

Conference Proceedings
Conference Proceedings
7. Contact and via hole mask design optimization for 65-nm technology node
Van Den Broeke, D. ; Shi, X. ; Socha, R. ; Laidig, T. ; Hollerbach, U. ; Wampler, K. E. ; Hsu, S. ; Chen, J. F. ; Corcoran, N. P. ; Dusa, M. V. ; Park, J. C.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.680-690,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
8.

Conference Proceedings
Conference Proceedings
8. OPC model calibration for CPL patterning at extreme low k1
Shi, X. ; Laidig, T. ; Chen, J. F. ; Van Den Broeke, D. ; Hsu, S. ; Hsu, M. ; Wampler, K. E. ; Hollerbach, U. ; Park, J. C. ; Yu, L.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.614-625,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567