1.
Conference Proceedings
Park, J.-H. ; Park, D.-W. ; Lee, J.-D. ; Hong, C. ; Han, W.-S. ; Moon., J.-T.
Pub. info.:
Chemical Mechanical Planarization : proceedings of the International Symposium . pp.283-289, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-21
2.
Conference Proceedings
Park, D.-W. ; Park, B.-K. ; Park, D.-K. ; Woo, H.-C.
Pub. info.:
Spillover and mobility of species on solid surfaces . pp.205-212, 2001. Amsterdam. Elsevier
Title of ser.:
Studies in surface science and catalysis
Ser. no.:
138
3.
Conference Proceedings
Shin, J. ; Kim, I. ; Hwang, C. ; Park, D.-W. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T.
Pub. info.:
Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA . pp.65-73, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5378
4.
Conference Proceedings
Park, D.-W. ; Lee, S. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S.
Pub. info.:
Optical Microlithography XVII . pp.1422-1426, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
5.
Conference Proceedings
Lee, S. ; Hwang, C. ; Park, D.-W. ; Kim, I.-S. ; Kim, H.-C. ; Woo, S.-G. ; Cho, H.-K. ; Moon, J.-T.
Pub. info.:
Optical Microlithography XVII . pp.1413-1421, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377