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84 results

Conference Proceedings

1. Surveillance technique for hybrid WDM/PS-PON using a tunable OTDR [5855-237]

Hann, S. ; Yoo, J. ; Park, C.

Pub. info.:	17th International Conference on Optical Fibre Sensors. pp.964-967, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5855

Conference Proceedings

2. High NA polarized light lithography for O.29kl process [6154-15]

Park, C. ; Lee, J. ; Yang, K. ; Tseng, S. ; Min, Y.-H ; Yang, H. ; Yim, D. ; Kim, J.

Pub. info.:	Optical Microlithography XIX. pp.61540F-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

Conference Proceedings

3. Modeling OPC complexity for design for manufacturability [5992-69]

Gupta, P. ; Kahng, A. B. ; Muddu, S. ; Nakagawa, S. ; Park, C.

Pub. info.:	25th Annual BACUS Symposium on Photomask Technology. pp.59921W-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5992

Conference Proceedings

4. Effect of single walled carbon nanotubes (SWNTs) on the electromechanical response of a polyimide nanocomposite

Deshmukh, S. ; Call. C. ; Ounaies, Z. ; Park, C. ; Harrison, H.

Pub. info.:	Smart structures and materials 2006 : Electroactive polymer actuators and devices (EAPAD) : 27 February-2 March 2006, San Diego, California, USA. pp.61680Y-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6168

Conference Proceedings

5. Development of Cube-Textured Ni and Ni-W Alloy Tapes by Focused Infrared Heating

Chung, J.K. ; Bae, S.Y. ; Lee, S.G. ; Park, C. ; Yoo, S.I. ; Kim, C.J.

Pub. info.:	Eco-materials processing & design VII : proceedings of the Conference of the 7th International Symposium on Eco-materials Processing & Design, January 8-11 2006, Chengdu, China. pp.258-261, 2006. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	510-511

Conference Proceedings

6. Real-time damage localization by means of MEMS sensors and use of wireless data transmission (Invited Paper) [6178-11]

Shinozuka, M. ; Park, C. ; Chou, P. H. ; Fukuda, Y.

Pub. info.:	Nonintrusive inspection, structures monitoring, and smart systems for homeland security : 27-28 February 2006, San Diego, California, USA. pp.61780A-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6178

Conference Proceedings

7. CD control at low K1 optical lithography in DRAM device

Hong, J. ; Woo, C. ; Park, J. ; Cho, B. ; Choi, J.-S. ; Yang, H. ; Park, C. ; Shin, Y.-C. ; Kim, Y. ; Jeong, G. ; Kim, J. ; Kang, K. ; Kang, C. ; Yim, D. ; Song, Y.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XVII. 1 pp.406-414, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5038

Conference Proceedings

8. A high-frame-rate DUV-optimized CCD for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high NA imaging systems

Yim, D. ; Yang, H. ; Park, C. ; Hong, J. ; Choi, J.

Pub. info.:	Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.107-118, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5754

Conference Proceedings

9. OPC accuracy and process window verification methodology for sub-100-nm node

Yang, H. ; Park, C. ; Hong, J. ; Jeong, G. ; Cho, B. ; Choi, J. ; Kang, C. ; Yang, K. ; Kang, E. ; Ji, S. ; Yim, D. ; Song, Y.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XVIII. pp.437-443, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5375

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Conference Proceedings

10. Aligned carbon nanotube-polymer composites: investigating their electrical and physical characteristics

Banda, S. ; Ounaies, Z. ; Wilkinson, J. ; Park, C. ; Harrison, J.

Pub. info.:	Smart structures and materials 2004 : active materials : behavior and mechanics : 15-18 March 2004, San Diego, California, USA. pp.27-36, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5387

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