1.

Conference Proceedings
Conference Proceedings
1. Low Substrate Damage High-K Removal After Gate Patterning
Shamiryan, D. ; Paraschiv, V. ; Claes, M ; Boullart, W
Pub. info.: Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices.  pp.331-339,  2006.  Dordrecht.  Springer
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 220
2.

Conference Proceedings
Conference Proceedings
2. Stress Evolution in Integrated SrBi2Ta2O9 Ferroelectric Layers
Lisoni, J. G. ; Wafer, K. ; Johnson, J. A. ; Goux, L. ; Schwitters, M. ; Paraschiv, V. ; Maes, D. ; Haspeslagh, L. ; Caputa, C. ; Zambrano, R. ; Wouters, D. J.
Pub. info.: Ferroelectric thin films XII : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.3-8,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 784