Optimization of TMAH etching for MEMS
- Author(s):
Brida,S. ( ITC-IRST ) Ferrario,L. Guarnieri,V. Giacomozzi,F. Margesin,B. Paranjape,M. Verzellesi,G. Zen,M. - Publication title:
- Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3680
- Pub. Year:
- 1999
- Vol.:
- Part2
- Page(from):
- 969
- Page(to):
- 976
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431547 [0819431540]
- Language:
- English
- Call no.:
- P63600/3680
- Type:
- Conference Proceedings
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