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Automated defect cross-sectioning with an in-line DualBeam

Author(s):
Blanc-Coquand, S. ( STMicroelectronics (France) )
Hinschberger, B. ( STMicroelectronics (France) )
Rouchouze, E. ( STMicroelectronics (France) )
Sicurani, E. ( CEA-LETI (France) )
Castagna, M. ( FEI Co. (USA) )
Weschler, M. ( FEI Co. (USA) )
Dworkin, L. ( FEI Co. (USA) )
Renard, D. ( FEI Co. (USA) )
Panyasak, A. ( FEI Co. (USA) )
4 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5375
Pub. Year:
2004
Page(from):
819
Page(to):
826
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452887 [0819452882]
Language:
English
Call no.:
P63600/5375.2
Type:
Conference Proceedings

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