1.

Conference Proceedings
Conference Proceedings
1. Evolving the Shapes of Large Aspect Ratio Microstructures Through Plasma etching
Tandon,U.S. ; Pant,B.D.
Pub. info.: Physics of - Semiconductor Devices -.  Part 2  pp.1068-1070,  1998.  New Delhi.  Narosa Publishing House
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3316
2.

Conference Proceedings
Conference Proceedings
2. Development of Inverse TLDD Technique at CEERI
Andhare,P.N. ; Pant,B.D. ; Eranna,G. ; Virdi,G.S. ; Soni,R.N. ; Wadhawan,O.P.
Pub. info.: Proceedings of the Tenth International Workshop on the Physics of Semiconductor Devices (December 14-18, 1999).  Part2  pp.815-818,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3975
3.

Conference Proceedings
Conference Proceedings
3. Anisotropic Etching of AlSiCu in Chlorofluorocarbon Reactive Plasma for the Fabrication of VLSICs
Pant,B.D. ; Wadhawan,O.P.
Pub. info.: Proceedings of the Tenth International Workshop on the Physics of Semiconductor Devices (December 14-18, 1999).  Part2  pp.875-878,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3975