1.

Conference Proceedings
Conference Proceedings
1. Low Temperature Etching of Silylated Resist in an Oxygen Plasma Generated by an Electron Cyclotron Resonance Source
Sung, K.T. ; Juan, W.H. ; Pang, S.W.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.160-167,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
2.

Conference Proceedings
Conference Proceedings
2. HOT JET ETCHING THROUGH STENCIL MASKS
Geis, M.W. ; Pang, S.W. ; Efremow, N.N.
Pub. info.: Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A..  pp.143-146,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 76
3.

Conference Proceedings
Conference Proceedings
3. Damage Investigation of GaAs and InGaP Dry Etched with an Electron Cyclotron Resonance Source
Cole, M.W. ; Han, W.Y. ; Pfeffer, R.L. ; Eckart, D.W. ; Pang, S.W. ; Ko, K.K. ; Ren, F. ; Hobson, W.S. ; Lothian, J.R. ; Lopata, J. ; Caballero, J.A. ; Pearton, S.J.
Pub. info.: Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII).  pp.293-306,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-21
4.

Conference Proceedings
Conference Proceedings
4. Surface Damage on GaAs Etched Using a Multipolar Electron Cyclotron Resonance Source
Ko, K.K. ; Pang, S.W.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.415-424,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
5.

Conference Proceedings
Conference Proceedings
5. Surface Damage and Passivation by Plasma Processing
Pang, S.W.
Pub. info.: Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV).  pp.249-264,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-15
6.

Conference Proceedings
Conference Proceedings
6. Plasticizer-assisted polymer imprint and transfer
Tan, L. ; Kong, Y.P. ; Pang, S.W. ; Yee, A.F.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.1017-1022,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374