Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.431-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Ren, L. P. ; Liu, P. ; Pan, G. Z. ; Woo, Jason C. S.
Pub. info.:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.313-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.95-, 1998. Pittsburgh, Pa.. MRS - Materials Research Society
Ren, L. P. ; Liu, P. ; Pan, G. Z. ; Woo, Jason C. S.
Pub. info.:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.245-, 1998. Warrendale, Pa.. MRS - Materials Research Society