1.

Conference Proceedings

Conference Proceedings
Hogan, J. ; Progler, C. ; Chatila, A. ; Bruggeman, B. ; Heins, M. ; Pack, R. ; Boksha, V.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.21-38,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
2.

Technical Paper

Technical Paper
Pack, R. ; Najm, W. ; Koopmann, J.
Pub. info.: 2006 SAE world congress : technical paper.  2006.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2006
3.

Conference Proceedings

Conference Proceedings
Mason, M. ; Progler, C. J. ; Martin, P. ; Ham, Y. -M. ; Dillon, B. ; Pack, R. ; Heins, M. ; Gookassian, J. ; Garcia, J. ; Boksha, V.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59920D-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992