1.

Conference Proceedings
Conference Proceedings
1. Advanced statistical process control of a chemical vapor tungsten deposition process on an Applied Materials Centura reactor
J.A. Stefani ; S. Poarch ; S. Saxena ; P.K. Mozumder
Pub. info.: Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas.  pp.25-36,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2336
2.

Conference Proceedings
Conference Proceedings
2. Model-based equipment diagnosis
D.J. Collins ; A.J. Strojwas ; P.K. Mozumder
Pub. info.: Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas.  pp.89-100,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2336