1.

Conference Proceedings
Conference Proceedings
1. Quantitative Measurement of Pattern Collapse and Particle Removal Force
T. Kim ; K.L. Wostyn ; P. Mertens ; A.A. Busnaina ; J. Park
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.123-129,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
2.

Conference Proceedings
Conference Proceedings
2. Evolution of Silicon Cleaning Technology Over the Last Twenty Years
J. Ruzyllo ; T. Hattori ; R.E. Novak ; P. Mertens ; P. Besson
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.3-7,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
3.

Conference Proceedings
Conference Proceedings
3. METAL DEPOSITION ON Ge SURFACES
S. Sioncke ; B. Onsia ; K. Struys ; J. Rip ; R. Vos ; M. Meuris ; P. Mertens ; A. Theuwis
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.220-227,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
4.

Conference Proceedings
Conference Proceedings
4. PARTICLE-SUBSTRATE INTERACTIONS IN NON-AQUEOUS MEDIA STUDIED BY COLLOIDAL PROBE AFM
F. Barbagini ; W. Fyen ; J. Van Hoeymissen ; P. Mertens ; J. Fransaer
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.267-274,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
5.

Conference Proceedings
Conference Proceedings
5. SINGLE - WAFER WET CLEANING FOR A HIGH PARTICLE REMOVAL EFFICIENCY ON HYDROPHOBIC SURFACE
K. Sano ; A. Izumi ; A. Eitoku ; J. Snow ; E. Kesters ; P. Mertens
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.134-141,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
6.

Conference Proceedings
Conference Proceedings
6. SUPERCRITICAL CO₂ LOW-к DIELECTRIC REPAIR
S. Malhouitre ; J. Van Hoeymissen ; A. Muscat ; P. Mertens ; P. Granger
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.301-308,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)