1.

Conference Proceedings
Conference Proceedings
1. Modeling and Engineering of Hafnium Silicate (HfSiO) Gate Dielectrics Deposited by Nano-Laminated Atomic-Layer Deposition (NL-ALD)
V. S. Chang ; Y. Hou ; P. Hau ; P. Lim ; L. Yao ; F. Yen ; C. Hung ; H. Lin ; J. Jiang ; Y. Jin ; C. Chen ; H. Tao ; S. Chen ; S. Jang ; M. Liang
Pub. info.: Atomic layer deposition : at the 208th ECS Meeting, October 16-21, 2005, Los Angeles, California, USA.  pp.113-124,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(10)
2.

Conference Proceedings
Conference Proceedings
2. Results from the KLA-Tencor TeraScanXR reticle inspection tool
A. Dayal ; B. Mu ; V. Iyer ; P. Lim ; A. Goonesekera
Pub. info.: Photomask technology 2008.  2  pp.71223G-1-71223G-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122