1.

Conference Proceedings
Conference Proceedings
1. Fluoro-alcohol materials with tailored interfacial properties for immersion lithography
D. P. Sanders ; L. K. Sundberg ; R. Sooriyakumaran ; P. J. Brock ; R. A. DiPietro ; H. D. Truong ; D. C. Miller ; M. C. Lawson ; R. D. Allen
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519
2.

Conference Proceedings
Conference Proceedings
2. Lactones in 193 nm resists: What do they do?
H. Ito ; H. D. Truong ; P. J. Brock
Pub. info.: Advances in resist materials and processing technology XXV.  1  pp.692318-1-692318-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6923
3.

Conference Proceedings
Conference Proceedings
3. Contact angles and structure/surface property relationships of immersion materials
L. K. Sundberg ; D. P. Sanders ; R. Sooriyakumaran ; P. J. Brock ; R. D. Allen
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519
4.

Conference Proceedings
Conference Proceedings
4. Self-segregating materials for immersion lithography
D. P. Sanders ; L. K. Sundberg ; P. J. Brock ; H. Ito ; H. D. Truong
Pub. info.: Advances in resist materials and processing technology XXV.  1  pp.692309-1-692309-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6923