1.

Conference Proceedings
Conference Proceedings
1. SURFACE CHEMISTRY OF FLUORINE-CONTAINING MOLECULES RELATED TO CVD PROCESS ON SILICON NITRIDE: SiF4, XeF2, AND HF
Outka, Duane A.
Pub. info.: Chemical vapor deposition of refractory metals and ceramics II : symposium held December 4-6, 1991, Boston, Massachusetts, U.S.A..  pp.79-84,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 250
2.

Conference Proceedings
Conference Proceedings
2. THE REACTIVITY OF HCl AND METHYLTRICHLOROSILANE WITH SILICON CARBIDE SURFACES
Allendorf, Mark D. ; Outka, Duane A.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.439-444,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282
3.

Conference Proceedings
Conference Proceedings
3. The Reaction of NH3 With TiN: Implications for CVD
Schulberg, Michelle T. ; Allendorf, Mark D. ; Outka, Duane A.
Pub. info.: Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.453-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 410
4.

Conference Proceedings
Conference Proceedings
4. The Interaction of HCl With Polycrystalline β-SiC: Evidence for a Site-Blocking Mechanism for HCl Inhibition of SiC CVD
Schulberg, Michelle T. ; Allendorf, Mark D. ; Outka, Duane A.
Pub. info.: Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.471-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 410