1.

Conference Proceedings
Conference Proceedings
1. Thermodynamics and Kinetics of Methyltricyhiorosilane Decomposition
Allendorf, M.D. ; Melius, C.F. ; Osterheld, T.H.
Pub. info.: Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition.  pp.20-26,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-2
2.

Conference Proceedings
Conference Proceedings
2. Using Wafer-Scale Patterns for CMP Analysis
Lee, B. ; Gan, T. ; Boning, D.S. ; David, J. ; Bonner, B.A. ; McKeever, P. ; Osterheld, T.H.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D11.8/E8.8-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612
3.

Conference Proceedings
Conference Proceedings
3. Removal Rate, Uniformity and Defectivity Studies Of Chemical Mechanical Polishing of BPSG Films
Bonner, B.A. ; Fishkin, B. ; David, J. ; Garretson, C. ; Osterheld, T.H.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D11.6/E8.6-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612
4.

Conference Proceedings
Conference Proceedings
4. Thermochemistry of Gas-Phase Species Relevant to Titanium Nitride CVD
Allendorf, M.D. ; Janssen, C.L. ; Colvin, M.E. ; Melius, C.F. ; Nielsen, I.M.B. ; Osterheld, T.H. ; Ho, P.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.393-400,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
5.

Conference Proceedings
Conference Proceedings
5. Chemical Reactions in the CVD of Boron Nitride from BCI, and NH3
Allendorf, M.D. ; Osterheld, T.H.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.16-22,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5