1.

Conference Proceedings

Conference Proceedings
Srivastava,A. ; Osburn,C.M.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.253-264,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506
2.

Conference Proceedings

Conference Proceedings
Sun,J.J. ; Tsai,J.-Y. ; Yee,K.F. ; Osburn,C.M.
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology II.  pp.178-185,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2875